9/13/2011	12:38:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2011	12:38:20 AM	Recipe started at 12:38 AM
9/13/2011	12:38:20 AM	Helium valve closed
9/13/2011	12:38:20 AM	H2 valve closed
9/13/2011	12:38:20 AM	BCl3 valve closed
9/13/2011	12:38:20 AM	PH3 valve closed
9/13/2011	12:38:20 AM	SiCl4 pre valve closed
9/13/2011	12:38:20 AM	SiCl4 post valve closed
9/13/2011	12:38:20 AM	Main Vac valve closed
9/13/2011	12:38:20 AM	Bypass valve closed
9/13/2011	12:38:20 AM	Bubbler valve closed
9/13/2011	12:38:20 AM	Helium MFC set to  0.000000
9/13/2011	12:38:20 AM	H2 MFC set to  0.000000
9/13/2011	12:38:20 AM	BCl3 MFC set to  0.000000
9/13/2011	12:38:20 AM	PHl3 MFC set to  0.000000
9/13/2011	12:38:20 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:38:20 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:38:21 AM	Tube furnace set to 0
9/13/2011	12:38:24 AM	H2 valve closed
9/13/2011	12:38:24 AM	BCl3 valve closed
9/13/2011	12:38:24 AM	PH3 valve closed
9/13/2011	12:38:24 AM	SiCl4 pre valve closed
9/13/2011	12:38:24 AM	SiCl4 post valve closed
9/13/2011	12:38:24 AM	Main Vac valve closed
9/13/2011	12:38:24 AM	Bypass valve closed
9/13/2011	12:38:24 AM	Bubbler valve closed
9/13/2011	12:38:24 AM	Helium valve opened
9/13/2011	12:38:24 AM	Helium MFC set to  500.000000
9/13/2011	12:38:24 AM	H2 MFC set to  0.000000
9/13/2011	12:38:24 AM	BCl3 MFC set to  0.000000
9/13/2011	12:38:24 AM	PHl3 MFC set to  0.000000
9/13/2011	12:38:24 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:38:24 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:38:24 AM	Tube furnace set to 0
9/13/2011	12:39:29 AM	Helium valve closed
9/13/2011	12:39:29 AM	H2 valve closed
9/13/2011	12:39:29 AM	BCl3 valve closed
9/13/2011	12:39:29 AM	PH3 valve closed
9/13/2011	12:39:29 AM	SiCl4 pre valve closed
9/13/2011	12:39:29 AM	SiCl4 post valve closed
9/13/2011	12:39:29 AM	Main Vac valve closed
9/13/2011	12:39:29 AM	Bypass valve closed
9/13/2011	12:39:29 AM	Bubbler valve closed
9/13/2011	12:39:29 AM	Helium MFC set to  0.000000
9/13/2011	12:39:29 AM	H2 MFC set to  0.000000
9/13/2011	12:39:29 AM	BCl3 MFC set to  0.000000
9/13/2011	12:39:29 AM	PHl3 MFC set to  0.000000
9/13/2011	12:39:29 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:39:29 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:39:29 AM	Tube furnace set to 0
9/13/2011	12:39:30 AM	Run finished at 12:39 AM
9/13/2011	12:39:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2011	12:42:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2011	12:42:03 AM	Recipe started at 12:42 AM
9/13/2011	12:42:03 AM	Helium valve closed
9/13/2011	12:42:03 AM	H2 valve closed
9/13/2011	12:42:03 AM	BCl3 valve closed
9/13/2011	12:42:03 AM	PH3 valve closed
9/13/2011	12:42:03 AM	SiCl4 pre valve closed
9/13/2011	12:42:03 AM	SiCl4 post valve closed
9/13/2011	12:42:03 AM	Main Vac valve closed
9/13/2011	12:42:03 AM	Bubbler valve closed
9/13/2011	12:42:03 AM	Bypass valve opened
9/13/2011	12:42:03 AM	Helium MFC set to  0.000000
9/13/2011	12:42:03 AM	H2 MFC set to  0.000000
9/13/2011	12:42:03 AM	BCl3 MFC set to  0.000000
9/13/2011	12:42:03 AM	PHl3 MFC set to  0.000000
9/13/2011	12:42:03 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:42:03 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:42:03 AM	Tube furnace set to 0
9/13/2011	12:43:05 AM	Helium valve closed
9/13/2011	12:43:05 AM	H2 valve closed
9/13/2011	12:43:05 AM	BCl3 valve closed
9/13/2011	12:43:05 AM	PH3 valve closed
9/13/2011	12:43:05 AM	SiCl4 pre valve closed
9/13/2011	12:43:05 AM	SiCl4 post valve closed
9/13/2011	12:43:05 AM	Main Vac valve closed
9/13/2011	12:43:05 AM	Bubbler valve closed
9/13/2011	12:43:05 AM	Bypass valve opened
9/13/2011	12:43:05 AM	Helium MFC set to  0.000000
9/13/2011	12:43:05 AM	H2 MFC set to  0.000000
9/13/2011	12:43:05 AM	BCl3 MFC set to  0.000000
9/13/2011	12:43:05 AM	PHl3 MFC set to  0.000000
9/13/2011	12:43:05 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:43:05 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:43:05 AM	Tube furnace set to 0
9/13/2011	12:44:05 AM	Helium valve closed
9/13/2011	12:44:05 AM	H2 valve closed
9/13/2011	12:44:05 AM	BCl3 valve closed
9/13/2011	12:44:05 AM	PH3 valve closed
9/13/2011	12:44:05 AM	SiCl4 pre valve closed
9/13/2011	12:44:05 AM	SiCl4 post valve closed
9/13/2011	12:44:05 AM	Bypass valve closed
9/13/2011	12:44:05 AM	Bubbler valve closed
9/13/2011	12:44:05 AM	Main Vac valve opened
9/13/2011	12:44:05 AM	Helium MFC set to  0.000000
9/13/2011	12:44:05 AM	H2 MFC set to  0.000000
9/13/2011	12:44:05 AM	BCl3 MFC set to  0.000000
9/13/2011	12:44:05 AM	PHl3 MFC set to  0.000000
9/13/2011	12:44:05 AM	SiCl4 MFC set to  0.000000
9/13/2011	12:44:05 AM	Bypass solenoid MFC set to  0.000000
9/13/2011	12:44:06 AM	Tube furnace set to 0
9/13/2011	12:44:07 AM	Run finished at 12:44 AM
9/13/2011	12:44:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
